Materials and devices for nanoelectronic systems beyond ultimately scaled CMOS

In this chapter, we review some of the most recent results in these areas and put them in a unified context that covers a very wide range, from materials to system design. The first section presents a top-down silicon nanowire fabrication platform for high-mobility gate-all-around (GAA) MOSFETs and impact-ionization devices. Ferroelectric FET with sub-100-nm copolymer P(VDF-TrFE) gate dielectric are examined in the next section for nonvolatile memory applications, which is a very promising direction toward future high-density memory arrays, followed by a discussion of materials for piezoelectric nanodevices in the last section. © Springer Science+Business Media LLC 2009.